Peter Benkart

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Stotzard, DE

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Patents Grantslast 30 patents

Information Patent Grant
Sensor elements with cantilevered bar structures made of semiconduc...
- Patent number 7,504,658
- Issue date Mar 17, 2009
- Mike Kunze
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Sensor elements with cantilevered bar structures made of semiconduc...
- Publication number 20070176211
- Publication date Aug 2, 2007
- Mike Kunze
- B81 - MICRO-STRUCTURAL TECHNOLOGY