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Peter Borwin Staffeld
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Stuttgart, DE
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last 30 patents
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Patent Grant
Method for setting a pressure in a cavity formed with the aid of a...
Patent number
11,084,714
Issue date
Aug 10, 2021
Robert Bosch GmbH
Peter Borwin Staffeld
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a multilayer MEMS component, and corresponding...
Patent number
10,427,937
Issue date
Oct 1, 2019
Robert Bosch GmbH
Arnd Kaelberer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing microelectromechanical structures in a lay...
Patent number
9,932,223
Issue date
Apr 3, 2018
Robert Bosch GmbH
Hans Artmann
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
METHOD FOR SETTING A PRESSURE IN A CAVITY FORMED WITH THE AID OF A...
Publication number
20200156931
Publication date
May 21, 2020
ROBERT BOSCH GmbH
Peter Borwin Staffeld
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING A MULTILAYER MEMS COMPONENT, AND CORRESPONDING...
Publication number
20190016590
Publication date
Jan 17, 2019
ROBERT BOSCH GmbH
Arnd Kaelberer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ETCHING DEVICE AND ETCHING METHOD
Publication number
20170207067
Publication date
Jul 20, 2017
ROBERT BOSCH GmbH
Arnd Kaelberer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING MICROELECTROMECHANICAL STRUCTURES IN A LAY...
Publication number
20160304334
Publication date
Oct 20, 2016
ROBERT BOSCH GmbH
Hans Artmann
B81 - MICRO-STRUCTURAL TECHNOLOGY