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Peter C. Kochersperger
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Easton, CT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for and method of in-situ particle removal in a lithograp...
Patent number
11,333,984
Issue date
May 17, 2022
ASML Netherlands B.V.
Richard Joseph Bruls
B08 - CLEANING
Information
Patent Grant
Particle suppression systems and methods
Patent number
11,137,694
Issue date
Oct 5, 2021
ASML Netherlands B.V.
Yang-Shan Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus with a patterning device environment
Patent number
10,209,635
Issue date
Feb 19, 2019
ASML Holding N.V.
Peter Kochersperger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,669,984
Issue date
Jun 6, 2017
ASML Holding N.V.
Robert Gabriel Maria Lansbergen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,457,947
Issue date
Oct 4, 2016
ASML Holding N.V.
Robert Gabriël Maria Lansbergen
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Linear motor and lithography arrangement including linear motor
Patent number
9,083,227
Issue date
Jul 14, 2015
ASML Holding N.V.
Peter C. Kochersperger
G05 - CONTROLLING REGULATING
Information
Patent Grant
Lithographic apparatus and method for illumination uniformity corre...
Patent number
8,629,973
Issue date
Jan 14, 2014
ASML Holding N.V.
Richard Carl Zimmerman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,159,647
Issue date
Apr 17, 2012
ASML Holding N.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Real time telecentricity measurement
Patent number
7,999,939
Issue date
Aug 16, 2011
ASML Holding N.V.
Peter C. Kochersperger
G01 - MEASURING TESTING
Information
Patent Grant
Overlay correction by reducing wafer slipping after alignment
Patent number
7,786,607
Issue date
Aug 31, 2010
ASML Holding N.V.
Peter Kochersperger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical element damping systems
Patent number
7,751,130
Issue date
Jul 6, 2010
ASML Holding N.V.
Stephen Roux
G02 - OPTICS
Information
Patent Grant
Pressure sensor
Patent number
7,549,321
Issue date
Jun 23, 2009
ASML Holding N.V.
Peter C. Kochersperger
G01 - MEASURING TESTING
Information
Patent Grant
Overlay correction by reducing wafer slipping after alignment
Patent number
7,542,263
Issue date
Jun 2, 2009
ASML Holding N.V.
Peter Kochersperger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measuring distance using gas gauge proximity sensor
Patent number
7,500,380
Issue date
Mar 10, 2009
ASML Holding N.V.
Frederick Michael Carter
G01 - MEASURING TESTING
Information
Patent Grant
Pressure sensor
Patent number
7,472,580
Issue date
Jan 6, 2009
ASML Holding N.V.
Joseph H. Lyons
G01 - MEASURING TESTING
Information
Patent Grant
Method and systems for total focus deviation adjustments on maskles...
Patent number
7,414,701
Issue date
Aug 19, 2008
ASML Holding N.V.
Peter Kochersperger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,411,652
Issue date
Aug 12, 2008
ASML Holding N.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for transferring and loading a reticle
Patent number
7,278,817
Issue date
Oct 9, 2007
ASML Holding N.V.
Glenn M. Friedman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic tool with dual isolation system and method for configu...
Patent number
7,164,463
Issue date
Jan 16, 2007
ASML Holding N.V.
Daniel N. Galburt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic tool with dual isolation system and method for configu...
Patent number
7,158,213
Issue date
Jan 2, 2007
ASML Holding N.V.
Daniel N. Galburt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
High resolution gas gauge proximity sensor
Patent number
7,021,120
Issue date
Apr 4, 2006
ASML Holding N.V.
Frederick Michael Carter
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus for transferring and loading a reticle with a robotic ret...
Patent number
7,004,715
Issue date
Feb 28, 2006
ASML Holding N.V.
Glenn M. Friedman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Proximity sensor with self compensation for mechanism instability
Patent number
6,978,658
Issue date
Dec 27, 2005
ASML Holding N.V.
Peter Kochersperger
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic tool with dual isolation system and method for configu...
Patent number
6,859,258
Issue date
Feb 22, 2005
ASML Holding N.V.
Daniel N. Galburt
Information
Patent Grant
Lithographic tool with dual isolation system and method for configu...
Patent number
6,538,720
Issue date
Mar 25, 2003
Silicon Valley Group, Inc.
Daniel N. Galburt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR REGION OF INTEREST PROCESSING FOR RETICLE PARTICLE DETEC...
Publication number
20230055116
Publication date
Feb 23, 2023
ASML Holding N.V.
Peter Conrad KOCHERSPERGER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PARTICLE SUPPRESSION SYSTEMS AND METHODS
Publication number
20210173315
Publication date
Jun 10, 2021
ASML NETHERLANDS B.V.
Yang-Shan HUANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus For and Method of In-Situ Particle Removal in a Lithograp...
Publication number
20210041795
Publication date
Feb 11, 2021
ASML Netherlands B..V.
Richard Joseph BRULS
B08 - CLEANING
Information
Patent Application
LITHOGRAPHIC APPARATUS WITH A PATTERNING DEVICE ENVIRONMENT
Publication number
20170363975
Publication date
Dec 21, 2017
ASML Holding N.V.
Peter KOCHERSPERGER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Linear Motor and Lithography Arrangement Including Linear Motor
Publication number
20150256058
Publication date
Sep 10, 2015
ASML Holding N.V.
Peter C. KOCHERSPERGER
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140144805
Publication date
May 29, 2014
ASML NETHERLANDS B.V.
Robert Gabriel Maria Lansbergen
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20130100430
Publication date
Apr 25, 2013
ASML Holding N.V.
Robert Gabriël Maria LANSBERGEN
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
Linear Motor and Lithography Arrangement Including Linear Motor
Publication number
20130063711
Publication date
Mar 14, 2013
ASML Holding N.V.
Peter C. KOCHERSPERGER
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
Lithographic Apparatus and Method for Illumination Uniformity Corre...
Publication number
20100302525
Publication date
Dec 2, 2010
ASML Holding N.V.
Richard Carl ZIMMERMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Real Time Telecentricity Measurement
Publication number
20090046278
Publication date
Feb 19, 2009
ASML Holding N.V.
Peter C. Kochersperger
G01 - MEASURING TESTING
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20080297747
Publication date
Dec 4, 2008
ASML NETHERLANDS B.V.
Arno Jan BLEEKER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Pressure sensor
Publication number
20070186621
Publication date
Aug 16, 2007
ASML Holding N.V.
Peter C. Kochersperger
G01 - MEASURING TESTING
Information
Patent Application
Pressure sensor
Publication number
20070176121
Publication date
Aug 2, 2007
ASML Holding N.V.
Joseph H. Lyons
G01 - MEASURING TESTING
Information
Patent Application
Overlay Correction By Reducing Wafer Slipping After Alignment
Publication number
20070165357
Publication date
Jul 19, 2007
ASML Holding N.V.
Peter Kochersperger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Gas gauge proximity sensor with internal gas flow control
Publication number
20070151327
Publication date
Jul 5, 2007
ASML Holding N.V.
Peter Kochersperger
G01 - MEASURING TESTING
Information
Patent Application
Optical element damping systems
Publication number
20070153348
Publication date
Jul 5, 2007
ASML Holding N.V.
Stephen Roux
G02 - OPTICS
Information
Patent Application
VACUUM DRIVEN PROXIMITY SENSOR
Publication number
20070151328
Publication date
Jul 5, 2007
ASML Holding N.V.
Peter Kochersperger
G01 - MEASURING TESTING
Information
Patent Application
High resolution gas gauge proximity sensor
Publication number
20060272394
Publication date
Dec 7, 2006
ASML Holding N.V.
Frederick Michael Carter
G01 - MEASURING TESTING
Information
Patent Application
Method for transferring and loading a reticle
Publication number
20060182605
Publication date
Aug 17, 2006
ASML Holding N.V.
Glenn M. Friedman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic tool with dual isolation system and method for configu...
Publication number
20060092394
Publication date
May 4, 2006
Daniel N. Galburt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
High resolution gas gauge proximity sensor
Publication number
20050241371
Publication date
Nov 3, 2005
ASML Holding N.V.
Frederick Michael Carter
G01 - MEASURING TESTING
Information
Patent Application
Overlay correction by reducing wafer slipping after alignment
Publication number
20050186517
Publication date
Aug 25, 2005
ASML Holding N.V.
Peter Kochersperger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and systems for total focus deviation adjustments on maskles...
Publication number
20050074906
Publication date
Apr 7, 2005
ASML Holding N.V.
Peter Kochersperger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050068510
Publication date
Mar 31, 2005
ASML Netherlands B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic tool with dual isolation system and method for configu...
Publication number
20030164931
Publication date
Sep 4, 2003
Silicon Valley Group, Inc.
Daniel N. Galburt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for transferring and loading a reticle with a...
Publication number
20030129051
Publication date
Jul 10, 2003
ASML US, Inc.
Glenn M. Friedman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic tool with dual isolation system and method for configu...
Publication number
20020118346
Publication date
Aug 29, 2002
Silicon Valley Group, Inc.
Daniel N. Galburt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY