Peter Clement Paul Vanoppen

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Hechtel-Ekse, BE

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Patents Grantslast 30 patents

Information Patent Grant
Method of determining dose and focus, inspection apparatus, pattern...
- Patent number 9,964,853
- Issue date May 8, 2018
- ASML Netherlands B.V.
- Peter Clement Paul Vanoppen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus and method, lithographic apparatus, lithograph...
- Patent number 9,223,227
- Issue date Dec 29, 2015
- ASML Netherlands B.V.
- Kaustuve Bhattacharyya
- G01 - MEASURING TESTING
Information Patent Grant
Metrology method and apparatus, and device manufacturing method
- Patent number 9,158,194
- Issue date Oct 13, 2015
- ASML Netherlands B.V.
- Armand Eugene Albert Koolen
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for overlay measurement
- Patent number 8,982,328
- Issue date Mar 17, 2015
- ASML Netherlands B.V.
- Henricus Johannes Lambertus Megens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
- Patent number 8,848,195
- Issue date Sep 30, 2014
- ASML Netherlands B.V.
- Christian Marinus Leewis
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of determining a characteristic
- Patent number 8,502,955
- Issue date Aug 6, 2013
- ASML Netherlands B.V.
- Henricus Johannes Lambertus Megens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method of Determining Dose and Focus, Inspection Apparatus, Pattern...
- Publication number 20150293458
- Publication date Oct 15, 2015
- ASML NETHERLANDS B.V.
- Peter Clement Paul Vanoppen
- G01 - MEASURING TESTING
Information Patent Application
Metrology Method and Apparatus, and Device Manufacturing Method
- Publication number 20130100427
- Publication date Apr 25, 2013
- ASML NETHERLANDS B.V.
- Armand Eugene Albert KOOLEN
- G01 - MEASURING TESTING
Information Patent Application
Lithography measurements using scatterometry
- Publication number 20060192936
- Publication date Aug 31, 2006
- ASML NETHERLANDS B.V.
- Koen Van Ingen Schenau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY