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Peter DeGroot
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Bellevue, WA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Interometric optical system
Patent number
12,104,897
Issue date
Oct 1, 2024
Zygo Corporation
Peter J. de Groot
G01 - MEASURING TESTING
Information
Patent Grant
Metrology of multi-layer stacks
Patent number
10,591,284
Issue date
Mar 17, 2020
Zygo Corporation
Leslie L. Deck
G01 - MEASURING TESTING
Information
Patent Grant
Surface topography apparatus and method
Patent number
10,451,413
Issue date
Oct 22, 2019
Zygo Corporation
Peter J. De Groot
G01 - MEASURING TESTING
Information
Patent Grant
Calibration of scanning interferometers
Patent number
9,958,254
Issue date
May 1, 2018
Zygo Corporation
Peter J. de Groot
G02 - OPTICS
Information
Patent Grant
Measuring topography of aspheric and other non-flat surfaces
Patent number
9,798,130
Issue date
Oct 24, 2017
Zygo Corporation
Thomas Dresel
G02 - OPTICS
Information
Patent Grant
Double pass interferometric encoder system
Patent number
9,746,348
Issue date
Aug 29, 2017
Zygo Corporation
Peter J. de Groot
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for determining information about a transparent o...
Patent number
9,658,129
Issue date
May 23, 2017
Zygo Corporation
Xavier Colonna de Lega
G01 - MEASURING TESTING
Information
Patent Grant
Optical evaluation of lenses and lens molds
Patent number
9,599,534
Issue date
Mar 21, 2017
Zygo Corporation
Martin F. Fay
G01 - MEASURING TESTING
Information
Patent Grant
Interferometry employing refractive index dispersion broadening of...
Patent number
9,377,292
Issue date
Jun 28, 2016
Zygo Corporation
Peter J. de Groot
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric heterodyne optical encoder system
Patent number
9,140,537
Issue date
Sep 22, 2015
Zygo Corporation
Peter J. de Groot
G01 - MEASURING TESTING
Information
Patent Grant
Interferometry for lateral metrology
Patent number
9,025,162
Issue date
May 5, 2015
Zygo Corporation
Xavier Colonna de Lega
G01 - MEASURING TESTING
Information
Patent Grant
Double pass interferometric encoder system
Patent number
9,025,161
Issue date
May 5, 2015
Zygo Corporation
Peter de Groot
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric encoder systems
Patent number
8,988,690
Issue date
Mar 24, 2015
Zygo Corporation
Leslie L. Deck
G01 - MEASURING TESTING
Information
Patent Grant
Double pass interferometric encoder system
Patent number
8,941,842
Issue date
Jan 27, 2015
Zygo Corporation
Peter de Groot
G01 - MEASURING TESTING
Information
Patent Grant
Low coherence interferometry with scan error correction
Patent number
8,902,431
Issue date
Dec 2, 2014
Zygo Corporation
Jan Liesener
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric heterodyne optical encoder system
Patent number
8,885,172
Issue date
Nov 11, 2014
Zygo Corporation
Peter J. de Groot
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric methods for metrology of surfaces, films and underr...
Patent number
8,854,628
Issue date
Oct 7, 2014
Zygo Corporation
Xavier M. Colonna de Lega
G01 - MEASURING TESTING
Information
Patent Grant
Topographical profiling with coherence scanning interferometry
Patent number
8,780,334
Issue date
Jul 15, 2014
Zygo Corporation
Peter de Groot
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric encoder systems
Patent number
8,670,127
Issue date
Mar 11, 2014
Zygo Corporation
Leslie L. Deck
G01 - MEASURING TESTING
Information
Patent Grant
Fiber-based interferometer system for monitoring an imaging interfe...
Patent number
8,379,218
Issue date
Feb 19, 2013
Zygo Corporation
Leslie L. Deck
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric encoder systems
Patent number
8,300,233
Issue date
Oct 30, 2012
Zygo Corporation
Leslie L. Deck
G01 - MEASURING TESTING
Information
Patent Grant
Interferometer for overlay measurements
Patent number
8,248,617
Issue date
Aug 21, 2012
Zygo Corporation
Peter De Groot
G01 - MEASURING TESTING
Information
Patent Grant
Interferometer for determining overlay errors
Patent number
8,189,202
Issue date
May 29, 2012
Zygo Corporation
Jan Liesener
G01 - MEASURING TESTING
Information
Patent Grant
Analyzing surface structure using scanning interferometry
Patent number
8,126,677
Issue date
Feb 28, 2012
Zygo Corporation
Peter De Groot
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric systems and methods featuring spectral analysis of...
Patent number
8,120,781
Issue date
Feb 21, 2012
Zygo Corporation
Jan Liesener
G01 - MEASURING TESTING
Information
Patent Grant
Methods and systems for interferometric analysis of surfaces and re...
Patent number
8,107,085
Issue date
Jan 31, 2012
Zygo Corporation
Peter J. De Groot
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric analysis of under-resolved features
Patent number
8,072,611
Issue date
Dec 6, 2011
Zygo Corporation
Peter de Groot
G01 - MEASURING TESTING
Information
Patent Grant
Equal-path interferometer
Patent number
8,045,175
Issue date
Oct 25, 2011
Zygo Corporation
Peter J. De Groot
G01 - MEASURING TESTING
Information
Patent Grant
Scan error correction in low coherence scanning interferometry
Patent number
8,004,688
Issue date
Aug 23, 2011
Zygo Corporation
Mark Davidson
G01 - MEASURING TESTING
Information
Patent Grant
Interferometer utilizing polarization scanning
Patent number
7,978,337
Issue date
Jul 12, 2011
Zygo Corporation
Peter De Groot
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
INTEROMETRIC OPTICAL SYSTEM
Publication number
20240053143
Publication date
Feb 15, 2024
Zygo Corporation
Peter J. de Groot
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY OF MULTI-LAYER STACKS
Publication number
20190265023
Publication date
Aug 29, 2019
Zygo Corporation
Leslie L. Deck
G01 - MEASURING TESTING
Information
Patent Application
SURFACE TOPOGRAPHY APPARATUS AND METHOD
Publication number
20180180412
Publication date
Jun 28, 2018
Zygo Corporation
Peter J. de Groot
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CALIBRATION OF SCANNING INTERFEROMETERS
Publication number
20160047645
Publication date
Feb 18, 2016
Zygo Corporation
Peter J. de Groot
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL EVALUATION OF LENSES AND LENS MOLDS
Publication number
20160047711
Publication date
Feb 18, 2016
Zygo Corporation
Martin F. Fay
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL EVALUATION OF LENSES AND LENS MOLDS
Publication number
20160047712
Publication date
Feb 18, 2016
Zygo Corporation
Xavier Colonna de Lega
G01 - MEASURING TESTING
Information
Patent Application
DOUBLE PASS INTERFEROMETRIC ENCODER SYSTEM
Publication number
20150292913
Publication date
Oct 15, 2015
Zygo Corporation
Peter J. de Groot
G01 - MEASURING TESTING
Information
Patent Application
Measuring Topography of Aspheric and Other Non-Flat Surfaces
Publication number
20150192769
Publication date
Jul 9, 2015
Zygo Corporation
Thomas Dresel
G02 - OPTICS
Information
Patent Application
INTERFEROMETRIC HETERODYNE OPTICAL ENCODER SYSTEM
Publication number
20150043005
Publication date
Feb 12, 2015
Zygo Corporation
Peter J. de Groot
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETRY EMPLOYING REFRACTIVE INDEX DISPERSION
Publication number
20150043006
Publication date
Feb 12, 2015
Zygo Corporation
Peter J. de Groot
G01 - MEASURING TESTING
Information
Patent Application
COHERENCE SCANNING INTERFEROMETRY USING PHASE SHIFTED INTERFEROMETR...
Publication number
20150002852
Publication date
Jan 1, 2015
Zygo Corporation
Peter J. de Groot
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETRIC ENCODER SYSTEMS
Publication number
20140049782
Publication date
Feb 20, 2014
Zygo Corporation
Leslie L. Deck
G01 - MEASURING TESTING
Information
Patent Application
LOW COHERENCE INTERFEROMETRY WITH SCAN ERROR CORRECTION
Publication number
20130155413
Publication date
Jun 20, 2013
Zygo Corporation
Jan Liesener
G01 - MEASURING TESTING
Information
Patent Application
DOUBLE PASS INTERFEROMETRIC ENCODER SYSTEM
Publication number
20130114061
Publication date
May 9, 2013
Zygo Corporation
Peter de Groot
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETRIC HETERODYNE OPTICAL ENCODER SYSTEM
Publication number
20120194824
Publication date
Aug 2, 2012
Zygo Corporation
Peter de Groot
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETRIC ENCODER SYSTEMS
Publication number
20120170048
Publication date
Jul 5, 2012
Zygo Corporation
Leslie L. Deck
G01 - MEASURING TESTING
Information
Patent Application
DATA INTERPOLATION METHODS FOR METROLOGY OF SURFACES, FILMS AND UND...
Publication number
20120089365
Publication date
Apr 12, 2012
Zygo Corporation
Martin Fay
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETRIC METHODS FOR METROLOGY OF SURFACES, FILMS AND UNDERR...
Publication number
20120069326
Publication date
Mar 22, 2012
Zygo Corporation
Xavier M. Colonna de Lega
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETRIC ENCODER SYSTEMS
Publication number
20110255096
Publication date
Oct 20, 2011
Zygo Corporation
Leslie L. Deck
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETER FOR DETERMINING OVERLAY ERRORS
Publication number
20110032535
Publication date
Feb 10, 2011
Zygo Corporation
Jan Liesener
G01 - MEASURING TESTING
Information
Patent Application
Equal-Path Interferometer
Publication number
20110007323
Publication date
Jan 13, 2011
Zygo Corporation
Peter J. De Groot
G02 - OPTICS
Information
Patent Application
INTERFEROMETER AND METHOD FOR MEASURING CHARACTERISTICS OF OPTICALL...
Publication number
20100265516
Publication date
Oct 21, 2010
Peter De Groot
G01 - MEASURING TESTING
Information
Patent Application
ERROR COMPENSATION IN PHASE SHIFTING INTERFEROMETRY
Publication number
20100238455
Publication date
Sep 23, 2010
Zygo Corporation
Peter De Groot
G01 - MEASURING TESTING
Information
Patent Application
COMPOUND REFERENCE INTERFEROMETER
Publication number
20100128276
Publication date
May 27, 2010
Zygo Corporation
Peter De Groot
G01 - MEASURING TESTING
Information
Patent Application
FIBER-BASED INTERFEROMETER SYSTEM FOR MONITORING AN IMAGING INTERFE...
Publication number
20100128278
Publication date
May 27, 2010
Zygo Corporation
Leslie L. Deck
G01 - MEASURING TESTING
Information
Patent Application
SCAN ERROR CORRECTION IN LOW COHERENCE SCANNING INTERFEROMETRY
Publication number
20100128280
Publication date
May 27, 2010
Zygo Corporation
Mark Davidson
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETRIC SYSTEMS AND METHODS FEATURING SPECTRAL ANALYSIS OF...
Publication number
20100128283
Publication date
May 27, 2010
Zygo Corporation
Jan Liesener
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETER SYSTEM FOR MONITORING AN OBJECT
Publication number
20100091296
Publication date
Apr 15, 2010
Zygo Corporation
Peter De Groot
G01 - MEASURING TESTING
Information
Patent Application
METHODS AND SYSTEMS FOR INTERFEROMETRIC ANALYSIS OF SURFACES AND RE...
Publication number
20100060898
Publication date
Mar 11, 2010
PETER J. DE GROOT
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETRY FOR LATERAL METROLOGY
Publication number
20090303493
Publication date
Dec 10, 2009
Zygo Corporation
Xavier Colonna de Lega
G01 - MEASURING TESTING