Peter Deufel

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and device for the correction of imaging defects
- Patent number 11,003,088
- Issue date May 11, 2021
- Carl Zeiss SMT GmbH
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for the correction of imaging defects
- Patent number 10,620,543
- Issue date Apr 14, 2020
- Carl Zeiss SMT GmbH
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Connection arrangement for a force-fit connection between ceramic c...
- Patent number 10,571,813
- Issue date Feb 25, 2020
- Carl Zeiss SMT GmbH
- Karsten Siegmanski
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Projection exposure apparatus with near-field manipulator
- Patent number 10,108,094
- Issue date Oct 23, 2018
- Carl Zeiss SMT GmbH
- Peter Deufel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for replacing objective parts
- Patent number 9,551,944
- Issue date Jan 24, 2017
- Carl Zeiss SMT GmbH
- Bernhard Geuppert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical arrangement in a projection exposure apparatus for EUV lith...
- Patent number 9,298,111
- Issue date Mar 29, 2016
- Carl Zeiss SMT GmbH
- Viktor Kulitzki
- G02 - OPTICS
Information Patent Grant
Method and device for the correction of imaging defects
- Patent number 8,159,648
- Issue date Apr 17, 2012
- Carl Zeiss SMT GmbH
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Housing structure
- Patent number 8,018,664
- Issue date Sep 13, 2011
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Grant
Optical element module
- Patent number 7,986,472
- Issue date Jul 26, 2011
- Carl Zeiss SMT, AG.
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus, device manufacturing method and exchangeabl...
- Patent number 7,724,351
- Issue date May 25, 2010
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS
- Publication number 20200233314
- Publication date Jul 23, 2020
- Carl Zeiss SMT GMBH
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS
- Publication number 20190302627
- Publication date Oct 3, 2019
- Carl Zeiss SMT GMBH
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONNECTION ARRANGEMENT FOR A FORCE-FIT CONNECTION BETWEEN CERAMIC C...
- Publication number 20170184982
- Publication date Jun 29, 2017
- Carl Zeiss SMT GMBH
- Karsten Siegmanski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS WITH NEAR-FIELD MANIPULATOR
- Publication number 20170052453
- Publication date Feb 23, 2017
- Carl Zeiss SMT GMBH
- Peter Deufel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS
- Publication number 20160026094
- Publication date Jan 28, 2016
- Carl Zeiss SMT GMBH
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Device for Replacing Objective Parts
- Publication number 20140359990
- Publication date Dec 11, 2014
- Bernhard Geuppert
- B08 - CLEANING
Information Patent Application
OPTICAL ARRANGEMENT IN A PROJECTION EXPOSURE APPARATUS FOR EUV LITH...
- Publication number 20120188523
- Publication date Jul 26, 2012
- Carl Zeiss SMT GMBH
- Viktor Kulitsky
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS
- Publication number 20120176591
- Publication date Jul 12, 2012
- Carl Zeiss SMT GMBH
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HOUSING STRUCTURE
- Publication number 20110216428
- Publication date Sep 8, 2011
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G02 - OPTICS
Information Patent Application
HOUSING STRUCTURE
- Publication number 20090303626
- Publication date Dec 10, 2009
- Carl Zeiss SMT AG
- Stefan Xalter
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR REPLACING OBJECTIVE PARTS
- Publication number 20090260654
- Publication date Oct 22, 2009
- Carl Zeiss SMT AG
- Bernhard Geuppert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS
- Publication number 20080316444
- Publication date Dec 25, 2008
- Carl Zeiss SMT AG
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method
- Publication number 20080073596
- Publication date Mar 27, 2008
- ASML NETHERLANDS B.V.
- Antonius Theodorus Anna Maria Derksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method and exchangeabl...
- Publication number 20070177122
- Publication date Aug 2, 2007
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical element module
- Publication number 20070146906
- Publication date Jun 28, 2007
- Jens Kugler
- G02 - OPTICS

Peter Deufel

Person

Patents Grantslast 30 patents

Method and device for the correction of imaging defects

Method and device for the correction of imaging defects

Connection arrangement for a force-fit connection between ceramic c...

Projection exposure apparatus with near-field manipulator

Method for replacing objective parts

Optical arrangement in a projection exposure apparatus for EUV lith...

Method and device for the correction of imaging defects

Housing structure

Optical element module

Lithographic apparatus, device manufacturing method and exchangeabl...

Patents Applicationslast 30 patents

METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS

METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS

CONNECTION ARRANGEMENT FOR A FORCE-FIT CONNECTION BETWEEN CERAMIC C...

PROJECTION EXPOSURE APPARATUS WITH NEAR-FIELD MANIPULATOR

METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS

Method and Device for Replacing Objective Parts

OPTICAL ARRANGEMENT IN A PROJECTION EXPOSURE APPARATUS FOR EUV LITH...

METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS

HOUSING STRUCTURE

HOUSING STRUCTURE

METHOD AND DEVICE FOR REPLACING OBJECTIVE PARTS

METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS

Lithographic apparatus and method

Lithographic apparatus, device manufacturing method and exchangeabl...

Optical element module