Peter Dirksen

Person

Leuven, BE

People

Patents Grantslast 30 patents

Information Patent Grant
Removable pellicle for immersion lithography
- Patent number 8,067,147
- Issue date Nov 29, 2011
- Koninklijke Philips Electronics N.V.
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method of manufacturing a device
- Patent number 7,659,041
- Issue date Feb 9, 2010
- Koninklijke Philips Electronics N.V.
- Peter Dirksen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and system for determining the aberration of an imaging s...
- Patent number 7,423,739
- Issue date Sep 9, 2008
- Koninklijke Philips Electronics N.V.
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method of manufacturing a device
- Patent number 7,037,626
- Issue date May 2, 2006
- Koninklijke Philips Electronics N.V.
- Peter Dirksen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of measuring the performance of a scanning electron microscope
- Patent number 6,960,764
- Issue date Nov 1, 2005
- Koninklijke Philips Electronics N.V.
- Peter Dirksen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND DEVICES FOR CHARACTERIZING POLARIZATION OF ILLUMINATION...
- Publication number 20100215273
- Publication date Aug 26, 2010
- Koninklijke Philips Electronics, N.V.
- Yuri Aksenov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Determining Image Blur in an Imaging System
- Publication number 20080226152
- Publication date Sep 18, 2008
- Koninklijke Philips Electronics, N.V.
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography system using a programmable electro-wetting mask
- Publication number 20070134560
- Publication date Jun 14, 2007
- Koninklijke Philips Electronic, N.V.
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic projection device, method an substrate for manufacturi...
- Publication number 20070103658
- Publication date May 10, 2007
- Koninklijke Philips Electronic, N.V.
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Removable pellicle for immersion lithography
- Publication number 20070064215
- Publication date Mar 22, 2007
- Koninklijke Philips Electronic, N.V.
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of measuring the performance of an illumination system
- Publication number 20060215140
- Publication date Sep 28, 2006
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Determning lithographic parameters to optimise a process window
- Publication number 20060206851
- Publication date Sep 14, 2006
- Koninklijke Philips Electronics N.V.
- Johannes Van Wingerden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic method of manufacturing a device
- Publication number 20060160029
- Publication date Jul 20, 2006
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of and system for determining the aberration of an imaging s...
- Publication number 20050117148
- Publication date Jun 2, 2005
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of measuring the performance of a scanning electron microscope
- Publication number 20040173748
- Publication date Sep 9, 2004
- Peter Dirksen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lithographic method of manufacturing a device
- Publication number 20040146808
- Publication date Jul 29, 2004
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Peter Dirksen

Person

Patents Grantslast 30 patents

Removable pellicle for immersion lithography

Lithographic method of manufacturing a device

Method of and system for determining the aberration of an imaging s...

Lithographic method of manufacturing a device

Method of measuring the performance of a scanning electron microscope

Patents Applicationslast 30 patents

METHODS AND DEVICES FOR CHARACTERIZING POLARIZATION OF ILLUMINATION...

Determining Image Blur in an Imaging System

Lithography system using a programmable electro-wetting mask

Lithographic projection device, method an substrate for manufacturi...

Removable pellicle for immersion lithography

Method of measuring the performance of an illumination system

Determning lithographic parameters to optimise a process window

Lithographic method of manufacturing a device

Method of and system for determining the aberration of an imaging s...

Method of measuring the performance of a scanning electron microscope

Lithographic method of manufacturing a device