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Peter Fabian
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Jena, DE
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last 30 patents
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Patent Grant
Charging device for semiconductor processing installations
Patent number
5,715,929
Issue date
Feb 10, 1998
Jenoptik Technologie GmbH
Werner Scheler
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Transport container for wafer-shaped objects
Patent number
5,664,679
Issue date
Sep 9, 1997
Jenoptik Aktiengesellschaft
Heinz Schneider
H01 - BASIC ELECTRIC ELEMENTS