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Peter Gerardus JONKERS
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Prolonging optical element lifetime in an EUV lithography system
Patent number
11,846,887
Issue date
Dec 19, 2023
ASML Netherlands B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Prolonging optical element lifetime in an EUV lithography system
Patent number
11,340,532
Issue date
May 24, 2022
ASML Netherlands B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, a projection system and a device manufactur...
Patent number
10,310,394
Issue date
Jun 4, 2019
ASML Netherlands B.V.
Yuri Johannes Gabriel Van De Vijver
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for determining a suppression factor of a suppres...
Patent number
8,711,325
Issue date
Apr 29, 2014
ASML Netherlands B.V.
Hendrikus Gijsbertus Schimmel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus configured to suppress contamination from pa...
Patent number
8,625,068
Issue date
Jan 7, 2014
ASML Netherlands B.V.
Han-Kwang Nienhuys
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,289,498
Issue date
Oct 16, 2012
ASML Netherlands B.V.
Erik Roelof Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
Publication number
20240160109
Publication date
May 16, 2024
ASML NETHERLANDS B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
Publication number
20220291591
Publication date
Sep 15, 2022
ASML NETHERLANDS B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
Publication number
20210109452
Publication date
Apr 15, 2021
ASML NETHERLANDS B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, A PROJECTION SYSTEM AND A DEVICE MANUFACTUR...
Publication number
20170097579
Publication date
Apr 6, 2017
ASML NETHERLANDS B.V.
Yuri Johannes Gabriel VAN DE VIJVER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Method
Publication number
20120002182
Publication date
Jan 5, 2012
ASML NETHERLANDS B.V.
Han-Kwang Nienhuys
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SYSTEM FOR DETERMINING A SUPPRESSION FACTOR OF A SUPPRES...
Publication number
20110261329
Publication date
Oct 27, 2011
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus Schimmel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, A PROJECTION SYSTEM AND A DEVICE MANUFACTUR...
Publication number
20100309447
Publication date
Dec 9, 2010
ASML NETHERLANDS B.V.
Yuri Johannes Gabriel Van de Vijver
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100002207
Publication date
Jan 7, 2010
ASML NETHERLANDS B.V.
Erik Roelof LOOPSTRA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY