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Peter Goglia
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Alamo, CA, US
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last 30 patents
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Patent Grant
Wafer stage for symmetric wafer processing
Patent number
9,863,036
Issue date
Jan 9, 2018
Plasma-Therm NES LLC
Sarpangala H. Hegde
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
WAFER STAGE FOR SYMMETRIC WAFER PROCESSING
Publication number
20150307986
Publication date
Oct 29, 2015
NANO ETCH SYSTEMS, INC.
Sarpangala H. Hegde
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...