TREA

Peter Goglia

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  • Alamo, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer stage for symmetric wafer processing
    • Patent number 9,863,036
    • Issue date Jan 9, 2018
    • Plasma-Therm NES LLC
    • Sarpangala H. Hegde
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    WAFER STAGE FOR SYMMETRIC WAFER PROCESSING
    • Publication number 20150307986
    • Publication date Oct 29, 2015
    • NANO ETCH SYSTEMS, INC.
    • Sarpangala H. Hegde
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...