Peter Graf

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Konigsbronn, DE

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Patents Grantslast 30 patents

Information Patent Grant
Projection exposure system for semiconductor lithography having an...
- Patent number 11,415,894
- Issue date Aug 16, 2022
- Carl Zeiss SMT GmbH
- Judith Fingerhuth
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ELEMENT, OPTICAL SYSTEM, LITHOGRAPHY SYSTEM, AND METHOD FOR...
- Publication number 20230138850
- Publication date May 4, 2023
- Carl Zeiss SMT GMBH
- Johannes Kimling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY HAVING AN...
- Publication number 20210349399
- Publication date Nov 11, 2021
- Carl Zeiss SMT GMBH
- Judith Fingerhuth
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY