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Peter HOEKSTRA
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Veldhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Method for calibration of an encoder scale and a lithographic appar...
Patent number
9,606,458
Issue date
Mar 28, 2017
ASML Netherlands B.V.
Jeroen Dekkers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Lithographic apparatus and calibration method
Patent number
8,248,583
Issue date
Aug 21, 2012
ASML Netherlands B.V.
Marinus Aart Van Den Brink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METHOD FOR CALIBRATION OF AN ENCODER SCALE AND A LITHOGRAPHIC APPAR...
Publication number
20150241795
Publication date
Aug 27, 2015
ASML NETHERLANDS B.V.
Jeroen Dekkers
G01 - MEASURING TESTING
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Patent Application
Lithographic Apparatus and Calibration Method
Publication number
20100007867
Publication date
Jan 14, 2010
ASML NETHERLANDS B.V.
Marinus Aart VAN DEN BRINK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY