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Peter Hudek
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Jena, DE
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last 30 patents
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Patent Grant
Method for reducing the fogging effect
Patent number
7,435,517
Issue date
Oct 14, 2008
Vistec Electron Beam GmbH
Peter Hudek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for controlling the proximity effect correction
Patent number
7,241,542
Issue date
Jul 10, 2007
Leica Microsystems Lithography GmbH
Peter Hudek
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Device and method for maskless AFM microlithography
Patent number
7,141,808
Issue date
Nov 28, 2006
Ivo Rangelow
G11 - INFORMATION STORAGE
Patents Applications
last 30 patents
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Patent Application
Process for controlling the proximity effect correction
Publication number
20050287450
Publication date
Dec 29, 2005
Leica Microsystems Lithography GmbH
Peter Hudek
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method for reducing the fogging effect
Publication number
20050287451
Publication date
Dec 29, 2005
Leica Microsystems Lithography GmbH
Peter Hudek
B82 - NANO-TECHNOLOGY
Information
Patent Application
Device and method for maskless afm microlithography
Publication number
20050225011
Publication date
Oct 13, 2005
Ivo Rangelow
G01 - MEASURING TESTING