Peter J. Baumgartner

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Bethel, CT, US

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Patents Grantslast 30 patents

Information Patent Grant
Advanced illumination system for use in microlithography
- Patent number 6,775,069
- Issue date Aug 10, 2004
- ASML Holding N.V.
- Mark Oskotsky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Advanced illumination system for use in microlithography
- Publication number 20030076679
- Publication date Apr 24, 2003
- ASML US, Inc.
- Mark Oskotsky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY