Peter John Biles

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Orlando, FL, US

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Patents Grantslast 30 patents

Information Patent Grant
Removal of post etch residuals on wafer surface
- Patent number 6,566,269
- Issue date May 20, 2003
- Lucent Technologies Inc.
- Peter J. Biles
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Methods for cleaning processing chambers
- Publication number 20050066994
- Publication date Mar 31, 2005
- Peter John Biles
- B08 - CLEANING
Information Patent Application
Carbon hard mask for aluminum interconnect fabrication
- Publication number 20040180551
- Publication date Sep 16, 2004
- Peter John Biles
- H01 - BASIC ELECTRIC ELEMENTS