Peter Kloesch

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus for semiconductor lithography includi...
- Patent number 9,030,644
- Issue date May 12, 2015
- Carl Zeiss SMT GmbH
- Benjamin Sigel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for damping vibrations in projection exposure apparatuses fo...
- Patent number 8,212,992
- Issue date Jul 3, 2012
- Carl Zeiss SMT GmbH
- Peter Kloesch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDI...
- Publication number 20190121238
- Publication date Apr 25, 2019
- Carl Zeiss SMT GMBH
- Benjamin Sigel
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDI...
- Publication number 20150316855
- Publication date Nov 5, 2015
- Carl Zeiss SMT GMBH
- Benjamin Sigel
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDI...
- Publication number 20110317140
- Publication date Dec 29, 2011
- Carl Zeiss SMT GMBH
- Benjamin Sigel
- G02 - OPTICS
Information Patent Application
DEVICE FOR DAMPING VIBRATIONS IN PROJECTION EXPOSURE APPARATUSES FO...
- Publication number 20110205507
- Publication date Aug 25, 2011
- Carl Zeiss SMT GMBH
- Peter Kloesch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY