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Peter Kuschnerus

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  • Germany, DE
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method for repairing phase shift masks
    • Patent number 8,268,516
    • Issue date Sep 18, 2012
    • Carl Zeiss SMS GmbH
    • Axel Zibold
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD FOR REPAIRING PHASE SHIFT MASKS
    • Publication number 20100266937
    • Publication date Oct 21, 2010
    • CARL ZEISS SMS GMBH
    • Axel Zibold
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY