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Peter Laurentius Maria ROS
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Haaksbergen, NL
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last 30 patents
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Patent Grant
Stage system and a lithographic apparatus
Patent number
9,389,518
Issue date
Jul 12, 2016
ASML Netherlands B.V.
Antonius Franciscus Johannes De Groot
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Stage System and a Lithographic Apparatus
Publication number
20130162968
Publication date
Jun 27, 2013
ASML NETHERLANDS B.V.
Antonius Franciscus Johannes DE GROOT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY