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Peter Lokai
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Bovenden, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Absolute wavelength calibration of lithography laser using multiple...
Patent number
7,006,541
Issue date
Feb 28, 2006
Lambda Physik AG
Peter Lokai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Resonator arrangement for bandwidth control
Patent number
6,856,638
Issue date
Feb 15, 2005
Lambda Physik AG
Konstantin Aab
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
On-line quality control of the key optical components in lithograph...
Patent number
6,839,375
Issue date
Jan 4, 2005
Lambda Physik AG
Peter Lokai
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for reduction of spectral fluctuations
Patent number
6,792,023
Issue date
Sep 14, 2004
Lambda Physik AG
Juergen Kleinschmidt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wavelength and bandwidth monitor for excimer or molecular fluorine...
Patent number
6,717,973
Issue date
Apr 6, 2004
Lambda Physik AG
Dirk Basting
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for wavelength calibration
Patent number
6,608,848
Issue date
Aug 19, 2003
Lambda Physik AG
Jürgen Kleinschmidt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Absolute wavelength calibration of lithography laser using multiple...
Patent number
6,580,517
Issue date
Jun 17, 2003
Lambda Physik AG
Peter Lokai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Narrow band excimer or molecular fluorine laser having an output co...
Patent number
6,567,451
Issue date
May 20, 2003
Lambda Physik AG
Juergen Kleinschmidt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Narrow band excimer or molecular fluorine laser having an output co...
Patent number
6,553,050
Issue date
Apr 22, 2003
Lambda Physik AG
Juergen Kleinschmidt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Narrow band excimer or molecular fluorine laser having an output co...
Patent number
6,516,012
Issue date
Feb 4, 2003
Lambda Physik AG
Juergen Kleinschmidt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Narrow band excimer or molecular fluorine laser having an output co...
Patent number
6,421,365
Issue date
Jul 16, 2002
Lambda Physik AG
Juergen Kleinschmidt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for wavelength calibration
Patent number
6,272,158
Issue date
Aug 7, 2001
Lambda Physik AG
Jürgen Kleinschmidt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for wavelength calibration
Patent number
6,160,832
Issue date
Dec 12, 2000
Lambda Physik GmbH
Jurgen Kleinschmidt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Production of narrow-band coherent radiation by using at least one...
Patent number
5,896,220
Issue date
Apr 20, 1999
Lambda Physik Gessellschaft Zur
Uwe Stamm
G02 - OPTICS
Information
Patent Grant
Laser arrangement for generating narrow-band, tunable coherent radi...
Patent number
5,796,513
Issue date
Aug 18, 1998
Lambda Physik Gesellschaft zur Herstellung von Lasern MgH
Uwe Stamm
G02 - OPTICS
Information
Patent Grant
Tunable source of narrowband coherent radiation
Patent number
5,671,241
Issue date
Sep 23, 1997
Lambda Physik Gesellschaft Zur Herstelling Von Lasern MGH
Uwe Stamm
G02 - OPTICS
Information
Patent Grant
Tunable narrowband source of a coherent radiation
Patent number
5,663,973
Issue date
Sep 2, 1997
Lambda Physik Gesellschaft zur Herstellung von Lasern mbH
Uwe Stamm
G02 - OPTICS
Information
Patent Grant
Tunable, optical parametric oscillator
Patent number
5,661,595
Issue date
Aug 26, 1997
Lambda Physik Gesellschaft zur Herstellung von Lasern mbH
Uwe Stamm
G02 - OPTICS
Information
Patent Grant
Tunable narrowband optical parametrical oscillator
Patent number
5,659,419
Issue date
Aug 19, 1997
Lambda Physik Gesellschaft zur Herstellung von Lasern mbH
Peter Lokai
G02 - OPTICS
Information
Patent Grant
Method and apparatus for stabilizing the frequency of a laser beam
Patent number
4,905,243
Issue date
Feb 27, 1990
Lambda Physik Forschungs-Und Entwicklungs-GmbH
Peter Lokai
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Absolute wavelength calibration of lithography laser using multiple...
Publication number
20030210715
Publication date
Nov 13, 2003
Lambda Physik AG
Peter Lokai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High-resolution confocal Fabry-Perot interferometer for absolute sp...
Publication number
20030161374
Publication date
Aug 28, 2003
Lambda Physik AG
Peter Lokai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Resonator arrangement for bandwidth control
Publication number
20020141471
Publication date
Oct 3, 2002
Lambda Physik AG
Konstantin Aab
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Narrow band excimer or molecular fluorine laser having an output co...
Publication number
20020141474
Publication date
Oct 3, 2002
Juergen Kleinschmidt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Narrow band excimer or molecular fluorine laser having an output co...
Publication number
20020122452
Publication date
Sep 5, 2002
Lambda Physik AG.,
Juergen Kleinschmidt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wavelength and bandwidth monitor for excimer or molecular fluorine...
Publication number
20020018505
Publication date
Feb 14, 2002
Lambda Physik AG
Dirk Basting
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for wavelength calibration
Publication number
20020012368
Publication date
Jan 31, 2002
Lambda Physik AG
Jurgen Kleinschmidt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Absolute wavelength calibration of lithography laser using multiple...
Publication number
20020003817
Publication date
Jan 10, 2002
Peter Lokai
H01 - BASIC ELECTRIC ELEMENTS