Peter M. Kopalidis

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Arlington, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
System and method for cleaning silicon-coated surfaces in an ion im...
- Patent number 6,259,105
- Issue date Jul 10, 2001
- Axcelis Technologies, Inc.
- Ronald J. Eddy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for cleaning contaminated surfaces in an ion impl...
- Patent number 6,221,169
- Issue date Apr 24, 2001
- Axcelis Technologies, Inc.
- James D. Bernstein
- H01 - BASIC ELECTRIC ELEMENTS