PETER MCGRATH

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ROSEVILLE, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Techniques for improving etching in a plasma processing chamber
- Patent number 6,410,451
- Issue date Jun 25, 2002
- Lam Research Corporation
- Thomas D. Nguyen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TECHNIQUES FOR IMPROVING ETCHING IN A PLASMA PROCESSING CHAMBER
- Publication number 20010044212
- Publication date Nov 22, 2001
- THOMAS D. NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS