Peter Nehmiz

Person

Stuttgart-Rohr, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method of transferring a pattern into a radiation-sensitive layer
- Patent number 4,591,540
- Issue date May 27, 1986
- International Business Machines Corporation
- Harald Bohlen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Error-corrected corpuscular beam lithography
- Patent number 4,578,587
- Issue date Mar 25, 1986
- International Business Machines Corporation
- Uwe Behringer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam projection lithography
- Patent number 4,554,458
- Issue date Nov 19, 1985
- International Business Machines Corporation
- Uwe Behringer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mask and system for mutually aligning objects in ray exposure systems
- Patent number 4,513,203
- Issue date Apr 23, 1985
- International Business Machines Corporation
- Harald Bohlen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of compensating the proximity effect in electron beam projec...
- Patent number 4,504,558
- Issue date Mar 12, 1985
- International Business Machines Corporation
- Harald Bohlen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Shadow projection mask for ion implantation and ion beam lithography
- Patent number 4,448,865
- Issue date May 15, 1984
- International Business Machines Corporation
- Harald Bohlen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of compensating the proximity effect in electron beam projec...
- Patent number 4,426,584
- Issue date Jan 17, 1984
- International Business Machines Corporation
- Harald Bohlen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of making mask for structuring surface areas
- Patent number 4,417,946
- Issue date Nov 29, 1983
- International Business Machines Corporation
- Harald Bohlen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment system for particle beam lithography
- Patent number 4,370,554
- Issue date Jan 25, 1983
- International Business Machines Corporation
- Harald Bohlen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mask for structuring surface areas, and method of making it
- Patent number 4,342,817
- Issue date Aug 3, 1982
- International Business Machines Corporation
- Harald Bohlen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of shadow printing exposure
- Patent number 4,334,156
- Issue date Jun 8, 1982
- International Business Machines Corporation
- Harald Bohlen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure process
- Patent number 4,267,259
- Issue date May 12, 1981
- International Business Machines Corporation
- Harald Bohlen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of exposure by means of corpuscular beam shadow printing
- Patent number 4,169,230
- Issue date Sep 25, 1979
- International Business Machines Corporation
- Harald Bohlen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Peter Nehmiz

Person

Patents Grantslast 30 patents

Method of transferring a pattern into a radiation-sensitive layer

Error-corrected corpuscular beam lithography

Electron beam projection lithography

Mask and system for mutually aligning objects in ray exposure systems

Method of compensating the proximity effect in electron beam projec...

Shadow projection mask for ion implantation and ion beam lithography

Method of compensating the proximity effect in electron beam projec...

Method of making mask for structuring surface areas

Alignment system for particle beam lithography

Mask for structuring surface areas, and method of making it

Method of shadow printing exposure

Exposure process

Method of exposure by means of corpuscular beam shadow printing