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Peter Nieland
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Aalen, DE
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Patents Grants
last 30 patents
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Patent Grant
Projection exposure apparatus for semiconductor lithography having...
Patent number
11,754,934
Issue date
Sep 12, 2023
Carl Zeiss SMT GmbH
Peter Nieland
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METHOD FOR MOUNTING AN OPTICAL SYSTEM
Publication number
20220283503
Publication date
Sep 8, 2022
Carl Zeiss SMT GMBH
Johann Dorn
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY HAVING...
Publication number
20220004111
Publication date
Jan 6, 2022
Carl Zeiss SMT GMBH
Peter Nieland
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY