Peter S. Thaulad

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Fixture for automatic calibration of substrate transfer robot
- Patent number 12,168,301
- Issue date Dec 17, 2024
- Lam Research Corporation
- Richard Blank
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Auto-calibration to a station of a process module that spins a wafer
- Patent number 11,742,229
- Issue date Aug 29, 2023
- Lam Research Corporation
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced automatic wafer centering system and techniques for same
- Patent number 11,581,214
- Issue date Feb 14, 2023
- Lam Research Corporation
- Peter S. Thaulad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auto-calibration to a station of a process module that spins a wafer
- Patent number 11,239,100
- Issue date Feb 1, 2022
- Lam Research Corporation
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced automatic wafer centering system and techniques for same
- Patent number 10,796,940
- Issue date Oct 6, 2020
- Lam Research Corporation
- Peter S. Thaulad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auto-calibration to a station of a process module that spins a wafer
- Patent number 10,651,065
- Issue date May 12, 2020
- Lam Research Corporation
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Smart vibration wafer with optional integration with semiconductor...
- Patent number 10,509,052
- Issue date Dec 17, 2019
- Lam Research Corporation
- Peter S. Thaulad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vision-based wafer notch position measurement
- Patent number 9,831,110
- Issue date Nov 28, 2017
- Lam Research Corporation
- Gustavo G. Francken
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Touch auto-calibration of process modules
- Patent number 9,349,629
- Issue date May 24, 2016
- Lam Research Corporation
- Richard M. Blank
- G05 - CONTROLLING REGULATING
Information Patent Grant
High throughput servo load cup with integrated wet chemistry delivery
- Patent number 7,811,153
- Issue date Oct 12, 2010
- Novellus Systems, Inc.
- Rich Blank
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER
- Publication number 20230395410
- Publication date Dec 7, 2023
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED ADAPTIVE POSITIONING SYSTEMS AND ROUTINES FOR AUTOMATED...
- Publication number 20220254666
- Publication date Aug 11, 2022
- LAM RESEARCH CORPORATION
- Hossein Sadeghi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
FIXTURE FOR AUTOMATIC CALIBRATION OF SUBSTRATE TRANSFER ROBOT
- Publication number 20220134568
- Publication date May 5, 2022
- LAM RESEARCH CORPORATION
- Richard BLANK
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER
- Publication number 20220108902
- Publication date Apr 7, 2022
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED AUTOMATIC WAFER CENTERING SYSTEM AND TECHNIQUES FOR SAME
- Publication number 20220028714
- Publication date Jan 27, 2022
- LAM RESEARCH CORPORATION
- Peter S. Thaulad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER
- Publication number 20200273731
- Publication date Aug 27, 2020
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED AUTOMATIC WAFER CENTERING SYSTEM AND TECHNIQUES FOR SAME
- Publication number 20200144097
- Publication date May 7, 2020
- LAM RESEARCH CORPORATION
- Peter S. Thaulad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER
- Publication number 20190172738
- Publication date Jun 6, 2019
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SMART VIBRATION WAFER WITH OPTIONAL INTEGRATION WITH SEMICONDUCTOR...
- Publication number 20180224500
- Publication date Aug 9, 2018
- LAM RESEARCH CORPORATION
- Peter S. Thaulad
- G01 - MEASURING TESTING
Information Patent Application
VISION-BASED WAFER NOTCH POSITION MEASUREMENT
- Publication number 20170032510
- Publication date Feb 2, 2017
- LAM RESEARCH CORPORATION
- Gustavo G. Francken
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TOUCH AUTO-CALIBRATION OF PROCESS MODULES
- Publication number 20150202774
- Publication date Jul 23, 2015
- LAM RESEARCH CORPORATION
- Richard M. Blank
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Peter S. Thaulad

Person

Patents Grantslast 30 patents

Fixture for automatic calibration of substrate transfer robot

Auto-calibration to a station of a process module that spins a wafer

Enhanced automatic wafer centering system and techniques for same

Auto-calibration to a station of a process module that spins a wafer

Enhanced automatic wafer centering system and techniques for same

Auto-calibration to a station of a process module that spins a wafer

Smart vibration wafer with optional integration with semiconductor...

Vision-based wafer notch position measurement

Touch auto-calibration of process modules

High throughput servo load cup with integrated wet chemistry delivery

Patents Applicationslast 30 patents

AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

INTEGRATED ADAPTIVE POSITIONING SYSTEMS AND ROUTINES FOR AUTOMATED...

FIXTURE FOR AUTOMATIC CALIBRATION OF SUBSTRATE TRANSFER ROBOT

AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

ENHANCED AUTOMATIC WAFER CENTERING SYSTEM AND TECHNIQUES FOR SAME

AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

ENHANCED AUTOMATIC WAFER CENTERING SYSTEM AND TECHNIQUES FOR SAME

AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

SMART VIBRATION WAFER WITH OPTIONAL INTEGRATION WITH SEMICONDUCTOR...

VISION-BASED WAFER NOTCH POSITION MEASUREMENT

TOUCH AUTO-CALIBRATION OF PROCESS MODULES