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Baarlo, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,860,926
Issue date
Oct 14, 2014
ASML Netherlands B.V.
Pieter Renaat Maria Hennus
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,481,978
Issue date
Jul 9, 2013
ASML Netherlands B.V.
Hans Jansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, seal structure...
Patent number
8,390,778
Issue date
Mar 5, 2013
ASML Netherlands B.V.
Patrick Johannes Cornelus Hendrik Smulders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,269,949
Issue date
Sep 18, 2012
ASML Netherlands B.V.
Marcus Martinus Petrus Adrianus Vermeulen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,138,486
Issue date
Mar 20, 2012
ASML Netherlands B.V.
Hans Jansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,115,905
Issue date
Feb 14, 2012
ASML Netherlands B.V.
Pieter Renaat Maria Hennus
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,928,407
Issue date
Apr 19, 2011
ASML Netherlands B.V.
Hans Jansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate support and lithographic process
Patent number
7,791,709
Issue date
Sep 7, 2010
ASML Netherlands B.V.
Pieter Renaat Maria Hennus
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus with mounted sensor
Patent number
7,755,742
Issue date
Jul 13, 2010
ASML Netherlands B.V.
Sebastiaan Maria Johannes Cornelissen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, seal structure...
Patent number
7,684,010
Issue date
Mar 23, 2010
ASML Netherlands B.V.
Patrick Johannes Cornelus Hendrick Smulders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,633,073
Issue date
Dec 15, 2009
ASML Netherlands B.V.
Hans Jansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,583,357
Issue date
Sep 1, 2009
ASML Netherlands B.V.
Sjoerd Nicolaas Lambertus Donders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,365,827
Issue date
Apr 29, 2008
ASML Netherlands B.V.
Pieter Renaat Maria Hennus
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120008114
Publication date
Jan 12, 2012
ASML NETHERLANDS B.V.
Pieter Renaat Maria HENNUS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110183257
Publication date
Jul 28, 2011
ASML NETHERLANDS B.V.
Hans JANSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110090474
Publication date
Apr 21, 2011
ASML NETHERLANDS B.V.
Hans JANSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, SEAL STRUCTURE...
Publication number
20100182578
Publication date
Jul 22, 2010
ASML NETHERLANDS B.V.
Patrick Johannes Cornelus Hendrik Smulders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100085551
Publication date
Apr 8, 2010
ASML NETHERLANDS B.V.
Marcus Martinus Petrus Adrianus VERMEULEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100044593
Publication date
Feb 25, 2010
ASML NETHERLANDS B.V.
Hans JANSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090279064
Publication date
Nov 12, 2009
ASML NETHERLANDS B.V.
Sjoerd Nicolaas Lambertus DONDERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080174752
Publication date
Jul 24, 2008
ASML NETHERLANDS B.V.
PIETER RENAAT MARIA HENNUS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate support and lithographic process
Publication number
20080158526
Publication date
Jul 3, 2008
ASML NETHERLANDS B.V.
Pieter Renaat Maria Hennus
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080137055
Publication date
Jun 12, 2008
ASML NETHERLANDS B.V.
Pieter Renaat Maria Hennus
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070114452
Publication date
May 24, 2007
ASML NETHERLANDS B.V.
Hans Jansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070114451
Publication date
May 24, 2007
ASML NETHERLANDS B.V.
Hans Jansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus
Publication number
20070081141
Publication date
Apr 12, 2007
ASML NETHERLANDS B.V.
Sebastiaan Maria Johannes Cornelissen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, seal structure...
Publication number
20060203215
Publication date
Sep 14, 2006
ASML NETHERLANDS B.V.
Patrick Johannes Cornelus Hendrik Smulders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060119817
Publication date
Jun 8, 2006
ASML NETHERLANDS B.V.
Pieter Renaat Maria Hennus
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060103820
Publication date
May 18, 2006
ASML NETHERLANDS B.V.
Sjoerd Nicolaas Lambertus Donders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY