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Peter TEN BERGE
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Methods and apparatus for measuring a property of a substrate
Patent number
11,977,034
Issue date
May 7, 2024
ASML Netherlands B.V.
Wouter Lodewijk Elings
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method for controlling a manufacturing process and associated appar...
Patent number
11,768,441
Issue date
Sep 26, 2023
ASML Netherlands B.V.
Peter Ten Berge
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method to predict yield of a device manufacturing process
Patent number
11,714,357
Issue date
Aug 1, 2023
ASML Netherlands B.V.
Alexander Ypma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection method and apparatus and lithographic processing cell
Patent number
RE49460
Issue date
Mar 14, 2023
ASML Netherlands B.V.
Everhardus Cornelis Mos
Information
Patent Grant
Inspection method and apparatus and lithographic processing cell
Patent number
RE49199
Issue date
Sep 6, 2022
ASML Netherlands B.V.
Everhardus Cornelis Mos
Information
Patent Grant
Method and apparatus for inspection and metrology
Patent number
11,170,072
Issue date
Nov 9, 2021
ASML Netherands B.V.
Everhardus Cornelis Mos
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method to predict yield of a device manufacturing process
Patent number
11,086,229
Issue date
Aug 10, 2021
ASML Netherlands B.V.
Alexander Ypma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus to reduce effects of nonlinear behavior
Patent number
11,036,146
Issue date
Jun 15, 2021
ASML Netherlands B.V.
Richard Johannes Franciscus Van Haren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for increasing accuracy of pattern positioning
Patent number
10,996,573
Issue date
May 4, 2021
ASML Netherlands B.V.
Peter Ten Berge
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and apparatus for measuring a property of a substrate
Patent number
10,996,176
Issue date
May 4, 2021
ASML Netherlands B.V.
Wouter Lodewijk Elings
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus to correct for patterning process error
Patent number
10,915,689
Issue date
Feb 9, 2021
ASML Netherlands B.V.
Peter Ten Berge
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for determining an optimized set of measurement locations fo...
Patent number
10,816,907
Issue date
Oct 27, 2020
ASML Netherlands B.V.
Peter Ten Berge
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and apparatus for measuring a property of a substrate
Patent number
10,746,668
Issue date
Aug 18, 2020
ASML Netherlands B.V.
Wouter Lodewijk Elings
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus to correct for patterning process error
Patent number
10,719,011
Issue date
Jul 21, 2020
ASML Netherlands B.V.
Peter Ten Berge
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus to correct for patterning process error
Patent number
10,691,863
Issue date
Jun 23, 2020
ASML Netherlands B.V.
Peter Ten Berge
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods and apparatus for measuring a property of a substrate
Patent number
10,317,191
Issue date
Jun 11, 2019
ASML Netherlands B.V.
Wouter Lodewijk Elings
G05 - CONTROLLING REGULATING
Information
Patent Grant
Methods and apparatus for measuring a property of a substrate
Patent number
9,594,029
Issue date
Mar 14, 2017
ASML Netherlands B.V.
Wouter Lodewijk Elings
G05 - CONTROLLING REGULATING
Information
Patent Grant
Inspection method and apparatus and lithographic processing cell
Patent number
8,887,107
Issue date
Nov 11, 2014
ASML Netherlands B.V.
Everhardus Cornelis Mos
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Imprint lithographic apparatus, device manufacturing method and dev...
Patent number
7,927,090
Issue date
Apr 19, 2011
ASML Netherlands B.V.
Peter Ten Berge
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Pre-aligning a substrate in a lithographic apparatus, device manufa...
Patent number
7,349,071
Issue date
Mar 25, 2008
ASML Netherlands B.V.
Henricus Wilhelmus Maria Van Buel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pre-aligning a substrate in a lithographic apparatus, device manufa...
Patent number
7,342,642
Issue date
Mar 11, 2008
ASML Netherlands B.V.
Henricus Wilhelmus Maria Van Buel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate, method of preparing a substrate, method of measurement,...
Patent number
7,253,077
Issue date
Aug 7, 2007
ASML Netherlands B.V.
Peter Ten Berge
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPAR...
Publication number
20240045340
Publication date
Feb 8, 2024
ASML NETHERLANDS B.V.
Peter TEN BERGE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPAR...
Publication number
20230108481
Publication date
Apr 6, 2023
ASML NETHERLANDS B.V.
Peter TEN BERGE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
Publication number
20220027437
Publication date
Jan 27, 2022
ASML NETHERLANDS B.V.
Everhardus Cornelis MOS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD TO PREDICT YIELD OF A DEVICE MANUFACTURING PROCESS
Publication number
20210325788
Publication date
Oct 21, 2021
ASML NETHERLANDS B.V.
Alexander YPMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Methods and Apparatus for Measuring a Property of a Substrate
Publication number
20210215622
Publication date
Jul 15, 2021
ASML NETHERLANDS B.V.
Wouter Lodewijk ELINGS
G05 - CONTROLLING REGULATING
Information
Patent Application
Methods and Apparatus for Measuring a Property of a Substrate
Publication number
20200319118
Publication date
Oct 8, 2020
ASML NETHERLANDS B.V.
Wouter Lodewijk ELINGS
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
METHOD AND SYSTEM FOR INCREASING ACCURACY OF PATTERN POSITIONING
Publication number
20200124989
Publication date
Apr 23, 2020
ASML NETHERLANDS B.V.
Peter TEN BERGE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD TO PREDICT YIELD OF A DEVICE MANUFACTURING PROCESS
Publication number
20200103761
Publication date
Apr 2, 2020
ASML NETHERLANDS B.V.
Alexander YPMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Methods and Apparatus for Measuring a Property of a Substrate
Publication number
20190301850
Publication date
Oct 3, 2019
ASML NETHERLANDS B.V.
Wouter Lodewijk ELINGS
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR DETERMINING AN OPTIMIZED SET OF MEASUREMENT LOCATIONS FO...
Publication number
20190258178
Publication date
Aug 22, 2019
ASML NETHERLANDS B.V.
Peter TEN BERGE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS TO MONITOR A PROCESS APPARATUS
Publication number
20190214318
Publication date
Jul 11, 2019
ASML NETHERLANDS B.V.
Mark John MASLOW
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS TO CORRECT FOR PATTERNING PROCESS ERROR
Publication number
20180322237
Publication date
Nov 8, 2018
ASML NETHERLANDS B.V.
Peter TEN BERGE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS TO REDUCE EFFECTS OF NONLINEAR BEHAVIOR
Publication number
20180314168
Publication date
Nov 1, 2018
ASML NETHERLANDS B.V.
Richard Johannes Franciscus VAN HAREN
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD AND APPARATUS TO CORRECT FOR PATTERNING PROCESS ERROR
Publication number
20180307135
Publication date
Oct 25, 2018
ASML NETHERLANDS B.V.
Peter TEN BERGE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS TO CORRECT FOR PATTERNING PROCESS ERROR
Publication number
20180299770
Publication date
Oct 18, 2018
ASML NETHERLANDS B.V.
Peter TEN BERGE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS TO CORRECT FOR PATTERNING PROCESS ERROR
Publication number
20180252998
Publication date
Sep 6, 2018
ASML NETHERLANDS B.V.
Peter TEN BERGE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
Publication number
20180067900
Publication date
Mar 8, 2018
ASML NETHERLANDS B.V.
Everhardus Cornelis MOS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Methods and Apparatus for Measuring a Property of a Substrate
Publication number
20170160073
Publication date
Jun 8, 2017
ASML NETHERLANDS B.V.
Wouter Lodewijk ELINGS
G01 - MEASURING TESTING
Information
Patent Application
Methods and Apparatus for Measuring A Property of a Substrate
Publication number
20140354969
Publication date
Dec 4, 2014
ASML NETHERLANDS B.V.
Wouter Lodewijk Elings
G01 - MEASURING TESTING
Information
Patent Application
Inspection Method and Apparatus and Lithographic Processing Cell
Publication number
20140089870
Publication date
Mar 27, 2014
ASML NETHERLANDS B.V.
Everhardus Cornelis MOS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
LITHOGRAPHIC APPARATUS AND ALIGNMENT METHOD
Publication number
20100060869
Publication date
Mar 11, 2010
ASML NETHERLANDS B.V.
Oleg Viacheslavovich Voznyi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and method
Publication number
20080117402
Publication date
May 22, 2008
ASML NETHERLANDS B.V.
Keith Frank Best
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pre-aligning a substrate in a lithographic apparatus, device manufa...
Publication number
20060285095
Publication date
Dec 21, 2006
ASML NETHERLANDS B.V.
Henricus Wilhelmus Maria Van Buel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY