Peter Ten Berge

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,567,340
- Issue date Jul 28, 2009
- ASML Netherlands B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for 3D alignment in wafer scale integration
- Patent number 7,562,686
- Issue date Jul 21, 2009
- ASML Netherlands B.V.
- Keith Frank Best
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080085462
- Publication date Apr 10, 2008
- ASML NETHERLANDS B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imprint Lithographic Apparatus, Device Manufacturing Method and Dev...
- Publication number 20070266875
- Publication date Nov 22, 2007
- ASML NETHERLANDS B.V.
- Peter Ten Berge
- B82 - NANO-TECHNOLOGY
Information Patent Application
Pre-aligning a substrate in a lithographic apparatus, device manufa...
- Publication number 20070019177
- Publication date Jan 25, 2007
- ASML NETHERLANDS B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for 3D aligment in wafer scale integration
- Publication number 20060172507
- Publication date Aug 3, 2006
- ASML NETHERLANDS B.V.
- Keith Frank Best
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Substrate, method of preparing a substrate, method of measurement,...
- Publication number 20050118781
- Publication date Jun 2, 2005
- Peter Ten Berge
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY