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Yamanashi, JP
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last 30 patents
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Patent Grant
Plasma processing apparatus, plasma processing method and storage m...
Patent number
9,252,001
Issue date
Feb 2, 2016
Tokyo Electron Limited
Ikuo Sawada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus, plasma processing method and storage m...
Patent number
8,636,871
Issue date
Jan 28, 2014
Tokyo Electron Limited
Ikuo Sawada
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Plasma Processing Apparatus, Plasma Processing Method and Storage M...
Publication number
20140138356
Publication date
May 22, 2014
TOKYO ELECTRON LIMITED
Ikuo Sawada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20110017706
Publication date
Jan 27, 2011
TOKYO ELECTRON LIMITED
Tetsuro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20100307684
Publication date
Dec 9, 2010
TOKYO ELECTRON LIMITED
Ryosaku Ota
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...
Publication number
20100006543
Publication date
Jan 14, 2010
TOKYO ELECTRON LIMITED
Ikuo Sawada
H01 - BASIC ELECTRIC ELEMENTS