Peter Weissbrodt

Follow

Person

Weimar, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Sensor for use in a lithographic apparatus
- Patent number 7,282,701
- Issue date Oct 16, 2007
- ASML Netherlands B.V.
- Haico Victor Kok
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY