Peter Zupan

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Villach, AT

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Patents Grantslast 30 patents

Information Patent Grant
Ion implantation method, ion implantation apparatus and semiconduct...
- Patent number 11,195,695
- Issue date Dec 7, 2021
- Infineon Technologies AG
- Moriz Jelinek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin substrate electrostatic chuck system and method
- Patent number 10,096,507
- Issue date Oct 9, 2018
- Infineon Technologies AG
- Ewald Wiltsche
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Thin substrate electrostatic chuck system and method
- Patent number 9,601,363
- Issue date Mar 21, 2017
- Infineon Technologies AG
- Ewald Wiltsche
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Thin substrate electrostatic chuck system and method
- Patent number 9,030,797
- Issue date May 12, 2015
- Infineon Technologies AG
- Ewald Wiltsche
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
Ion Implantation Method, Ion Implantation Apparatus and Semiconduct...
- Publication number 20190066977
- Publication date Feb 28, 2019
- INFINEON TECHNOLOGIES AG
- Moriz Jelinek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN SUBSTRATE ELECTROSTATIC CHUCK SYSTEM AND METHOD
- Publication number 20170148658
- Publication date May 25, 2017
- INFINEON TECHNOLOGIES AG
- Ewald Wiltsche
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Ion Source for Metal Implantation and Methods Thereof
- Publication number 20160322198
- Publication date Nov 3, 2016
- INFINEON TECHNOLOGIES AG
- Ewald Wiltsche
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN SUBSTRATE ELECTROSTATIC CHUCK SYSTEM AND METHOD
- Publication number 20150318199
- Publication date Nov 5, 2015
- INFINEON TECHNOLOGIES AG
- Ewald Wiltsche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN SUBSTRATE ELECTROSTATIC CHUCK SYSTEM AND METHOD
- Publication number 20130321973
- Publication date Dec 5, 2013
- INFINEON TECHNOLOGIES AG
- Ewald Wiltsche
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER