Peterjan Broomans

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Substrate positioning system, lithographic apparatus and device man...
- Patent number 9,470,988
- Issue date Oct 18, 2016
- ASML Netherlands B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MAN...
- Publication number 20150277242
- Publication date Oct 1, 2015
- ASML NETHERLANDS B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY