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Petra Albertina Margaretha Dekkers-Rog
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Eindhoven, NL
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last 30 patents
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Patent Grant
Level sensor for lithographic apparatus
Patent number
7,265,364
Issue date
Sep 4, 2007
ASML Netherlands B.V.
Paulus Antonius Andreas Teunissen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Lithographic apparatus, method of calibration, calibration plate, d...
Patent number
6,955,074
Issue date
Oct 18, 2005
ASML Netherlands, B.V.
Leon Martin Levasier
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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last 30 patents
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Patent Application
Level sensor for lithographic apparatus
Publication number
20050274909
Publication date
Dec 15, 2005
ASML NETHERLANDS B.V.
Paulus Antonius Andreas Teunissen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY