Petra Alen

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Helsinki, FI

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Patents Grantslast 30 patents

Information Patent Grant
Process for producing metal thin films by ALD
- Patent number 7,220,451
- Issue date May 22, 2007
- ASM International N.V
- Titta Aaltonen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing metal thin films by ALD
- Patent number 6,824,816
- Issue date Nov 30, 2004
- ASM International N.V.
- Titta Aaltonen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing metal nitride thin films
- Patent number 6,706,115
- Issue date Mar 16, 2004
- ASM International N.V.
- Markku Leskelä
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Process for producing metal thin films by ALD
- Publication number 20050020060
- Publication date Jan 27, 2005
- Titta Aaltonen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for producing metal thin films by ALD
- Publication number 20030165615
- Publication date Sep 4, 2003
- Titta Aaltonen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for preparing metal nitride thin films
- Publication number 20020182320
- Publication date Dec 5, 2002
- Markku Leskela
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...