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Petrus Anton Willem Cornelia Maria Van Eijck
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Budel, NL
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last 30 patents
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Patent Grant
Substrate placement in immersion lithography
Patent number
7,352,440
Issue date
Apr 1, 2008
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
SUBSTRATE PLACEMENT IN IMMERSION LITHOGRAPHY
Publication number
20120050740
Publication date
Mar 1, 2012
ASML NETHERLANDS B.V.
CHRISTIAAN ALEXANDER HOOGENDAM
G01 - MEASURING TESTING
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Patent Application
Object Alignment Measurement Method and Apparatus
Publication number
20110013188
Publication date
Jan 20, 2011
ASML NETHERLANDS B.V.
Daan Maurits SLOTBOOM
G01 - MEASURING TESTING