Petrus Anton Willern Cornelia Maria Van Eijck

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Budel, NL

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Patents Grantslast 30 patents

Information Patent Grant
Substrate placement in immersion lithography
- Patent number 8,077,291
- Issue date Dec 13, 2011
- ASML Netherlands B.V.
- Christiaan Alexander Hoogendam
- G01 - MEASURING TESTING