Petrus Carolus Johannes Graat

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Geldrop, NL

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Patents Applicationslast 30 patents

Information Patent Application
Apparatus for Monitoring a Lithographic Patterning Device
- Publication number 20140340663
- Publication date Nov 20, 2014
- ASML NETHERLANDS B.V.
- Luigi Scaccabarozzi
- G01 - MEASURING TESTING