Petrus Elizabeth Maria Kuijpers

Follow

Person

Bergeijk, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Spectral purity filter, lithographic apparatus, and method for manu...
- Patent number 9,195,152
- Issue date Nov 24, 2015
- ASML Netherlands B.V.
- Wouter Anthon Soer
- B82 - NANO-TECHNOLOGY