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Petrus Johannes Maria Broodbakker
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus, level sensor, method of inspection, device...
Patent number
7,646,471
Issue date
Jan 12, 2010
ASML Netherlands B.V.
Paulus Antonius Andreas Teunissen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, level sensor, method of inspection, device...
Patent number
7,248,337
Issue date
Jul 24, 2007
ASML Netherlands B.V.
Paulus Antonius Andreas Teunissen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Off-axis leveling in lithographic projection apparatus
Patent number
6,924,884
Issue date
Aug 2, 2005
ASML Netherlands B.V.
Marcus Emile Joannes Boonman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Lithographic apparatus, level sensor, method of inspection, device...
Publication number
20080036988
Publication date
Feb 14, 2008
ASML NETHERLANDS B.V.
Paulus Antonius Andreas Teunissen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, level sensor, method of inspection, device...
Publication number
20040165169
Publication date
Aug 26, 2004
ASML NETHERLANDS B.V.
Paulus Antonius Andreas Teunissen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY