Petrus Wilhelmus SMORENBURG

Person

Veldhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for efficient high harmonic generation
- Patent number 12,196,688
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Petrus Wilhelmus Smorenburg
- G01 - MEASURING TESTING
Information Patent Grant
Illumination source and associated metrology apparatus
- Patent number 12,044,951
- Issue date Jul 23, 2024
- ASML Netherlands B.V.
- Wenjie Jin
- G02 - OPTICS
Information Patent Grant
Illumination source for an inspection apparatus, inspection apparat...
- Patent number 11,347,155
- Issue date May 31, 2022
- ASML Netherlands B.V.
- David O Dwyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High harmonic generation radiation source
- Patent number 11,223,181
- Issue date Jan 11, 2022
- ASML Netherlands B.V.
- Petrus Wilhelmus Smorenburg
- G02 - OPTICS
Information Patent Grant
Methods and apparatus for metrology
- Patent number 10,996,568
- Issue date May 4, 2021
- ASML Netherlands B.V.
- Petrus Wilhelmus Smorenburg
- G01 - MEASURING TESTING
Information Patent Grant
Metrology apparatus for and a method of determining a characteristi...
- Patent number 10,670,974
- Issue date Jun 2, 2020
- ASML Netherlands B.V.
- Gerrit Jacobus Hendrik Brussaard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination source for an inspection apparatus, inspection apparat...
- Patent number 10,642,172
- Issue date May 5, 2020
- ASML Netherlands B.V.
- David O Dwyer
- G02 - OPTICS
Information Patent Grant
Apparatus for delivering gas and illumination source for generating...
- Patent number 10,630,037
- Issue date Apr 21, 2020
- ASML Netherlands B.V.
- Sudhir Srivastava
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for delivering gas and illumination source for generating...
- Patent number 10,530,111
- Issue date Jan 7, 2020
- ASML Netherlands B.V.
- Sudhir Srivastava
- G01 - MEASURING TESTING
Information Patent Grant
Free electron laser
- Patent number 10,381,796
- Issue date Aug 13, 2019
- ASML Netherlands B.V.
- Petrus Wilhelmus Smorenburg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for optical metrology
- Patent number 10,362,665
- Issue date Jul 23, 2019
- ASML Netherlands B.V.
- Petrus Wilhelmus Smorenburg
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
A CLEANING METHOD AND ASSOCIATED ILLUMINATION SOURCE METROLOGY APPA...
- Publication number 20240377765
- Publication date Nov 14, 2024
- ASML NETHERLANDS B.V.
- Petrus Wilhelmus SMORENBURG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AN ILLUMINATION SOURCE AND ASSOCIATED METHOD APPARATUS
- Publication number 20240272516
- Publication date Aug 15, 2024
- ASML NETHERLANDS B.V.
- Sjoerd Nicolaas Lambertus DONDERS
- G02 - OPTICS
Information Patent Application
ASSEMBLY FOR SEPARATING RADIATION IN THE FAR FIELD
- Publication number 20240168392
- Publication date May 23, 2024
- ASML NETHERLANDS B.V.
- Petrus Wilhelmus SMORENBURG
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METROLOGY APPARATUS AND METROLOGY METHODS BASED ON HIGH HARMONIC GE...
- Publication number 20240003809
- Publication date Jan 4, 2024
- ASML NETHERLANDS B.V.
- Peter Michael KRAUS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY APPARATUS BASED ON HIGH HARMONIC GENERATION AND ASSOCIATE...
- Publication number 20240004312
- Publication date Jan 4, 2024
- ASML NETHERLANDS B.V.
- Peter Michael KRAUS
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
WAVEFRONT METROLOGY SENSOR AND MASK THEREFOR, METHOD FOR OPTIMIZING...
- Publication number 20230341325
- Publication date Oct 26, 2023
- ASML NETHERLANDS B.V.
- Lars LOETGERING
- G01 - MEASURING TESTING
Information Patent Application
AN ILLUMINATION SOURCE AND ASSOCIATED METROLOGY APPARATUS
- Publication number 20230288818
- Publication date Sep 14, 2023
- ASML Netherlands B,V.
- Wenjie JIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR EFFICIENT HIGH HARMONIC GENERATION
- Publication number 20220390388
- Publication date Dec 8, 2022
- ASML NETHERLANDS B.V.
- Petrus Wilhelmus SMORENBURG
- G01 - MEASURING TESTING
Information Patent Application
AN ILLUMINATION SOURCE AND ASSOCIATED METROLOGY APPARATUS
- Publication number 20220382124
- Publication date Dec 1, 2022
- ASML NETHERLANDS B.V.
- Wenjie JIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination Source for an Inspection Apparatus, Inspection Apparat...
- Publication number 20210191274
- Publication date Jun 24, 2021
- ASML NETHERLANDS B.V.
- David O DWYER
- G02 - OPTICS
Information Patent Application
Methods and Apparatus for Metrology
- Publication number 20200201192
- Publication date Jun 25, 2020
- ASML NETHERLANDS B.V.
- Petrus Wilhelmus SMORENBURG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
High Harmonic Generation Radiation Source
- Publication number 20200067258
- Publication date Feb 27, 2020
- ASML NETHERLANDS B.V.
- Petrus Wilhelmus Smorenburg
- G02 - OPTICS
Information Patent Application
Illumination Source for an Inspection Apparatus, Inspection Apparat...
- Publication number 20190346776
- Publication date Nov 14, 2019
- ASML NETHERLANDS B.V.
- David O DWYER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus For Delivering Gas and Illumination Source for Generating...
- Publication number 20190212657
- Publication date Jul 11, 2019
- ASML NETHERLANDS B.V.
- Sudhir SRIVASTAVA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metrology Apparatus for and a Method of Determining a Characteristi...
- Publication number 20190204757
- Publication date Jul 4, 2019
- ASML NETHERLANDS B.V.
- Gerrit Jacobus Hendrik BRUSSAARD
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Free Electron Laser
- Publication number 20180366899
- Publication date Dec 20, 2018
- ASML NETHERLANDS B.V.
- Petrus Wilhelmus SMORENBURG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and Apparatus for Optical Metrology
- Publication number 20180368243
- Publication date Dec 20, 2018
- ASML NETHERLANDS B.V.
- Petrus Wilhelmus SMORENBURG
- G01 - MEASURING TESTING
Information Patent Application
Apparatus For Delivering Gas and Illumination Source for Generating...
- Publication number 20180267411
- Publication date Sep 20, 2018
- ASML NETHERLANDS B.V.
- Sudhir SRIVASTAVA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Petrus Wilhelmus SMORENBURG

Person

Patents Grantslast 30 patents

Method and apparatus for efficient high harmonic generation

Illumination source and associated metrology apparatus

Illumination source for an inspection apparatus, inspection apparat...

High harmonic generation radiation source

Methods and apparatus for metrology

Metrology apparatus for and a method of determining a characteristi...

Illumination source for an inspection apparatus, inspection apparat...

Apparatus for delivering gas and illumination source for generating...

Apparatus for delivering gas and illumination source for generating...

Free electron laser

Methods and apparatus for optical metrology

Patents Applicationslast 30 patents

A CLEANING METHOD AND ASSOCIATED ILLUMINATION SOURCE METROLOGY APPA...

AN ILLUMINATION SOURCE AND ASSOCIATED METHOD APPARATUS

ASSEMBLY FOR SEPARATING RADIATION IN THE FAR FIELD

METROLOGY APPARATUS AND METROLOGY METHODS BASED ON HIGH HARMONIC GE...

METROLOGY APPARATUS BASED ON HIGH HARMONIC GENERATION AND ASSOCIATE...

WAVEFRONT METROLOGY SENSOR AND MASK THEREFOR, METHOD FOR OPTIMIZING...

AN ILLUMINATION SOURCE AND ASSOCIATED METROLOGY APPARATUS

METHOD AND APPARATUS FOR EFFICIENT HIGH HARMONIC GENERATION

AN ILLUMINATION SOURCE AND ASSOCIATED METROLOGY APPARATUS

Illumination Source for an Inspection Apparatus, Inspection Apparat...

Methods and Apparatus for Metrology

High Harmonic Generation Radiation Source

Illumination Source for an Inspection Apparatus, Inspection Apparat...

Apparatus For Delivering Gas and Illumination Source for Generating...

Metrology Apparatus for and a Method of Determining a Characteristi...

Free Electron Laser

Methods and Apparatus for Optical Metrology

Apparatus For Delivering Gas and Illumination Source for Generating...