Pey-Yuan Lee

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Tainan, TW

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Patents Grantslast 30 patents

Information Patent Grant
Manufacturing method for microelectronic device
- Patent number 7,196,006
- Issue date Mar 27, 2007
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pey-Yuan Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Linewidth measurement tool calibration method employing linewidth s...
- Patent number 6,862,545
- Issue date Mar 1, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd
- Pey-Yuan Lee
- G01 - MEASURING TESTING
Information Patent Grant
Method for improved dielectric layer metrology calibration
- Patent number 6,710,889
- Issue date Mar 23, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Pey-Yuan Lee
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Carryover reduction in multiple CDSEM line matching
- Publication number 20050224995
- Publication date Oct 13, 2005
- Taiwan Semiconductor Manufacturing Co., LTD
- Pey-Yuan Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR IMPROVED DIELECTRIC LAYER METROLOGY CALIBRATION
- Publication number 20040004730
- Publication date Jan 8, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pey-Yuan Lee
- G01 - MEASURING TESTING