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Phani Ramachandran
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Santa Clara, CA, US
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Patent Application
Method and apparatus for the low temperature deposition of doped si...
Publication number
20070082507
Publication date
Apr 12, 2007
APPLIED MATERIALS, INC.
R. Suryanarayanan Iyer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...