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Phi Nguyen
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Hillsboro, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Use of conductive electrolessly deposited etch stop layers, liner l...
Patent number
7,008,872
Issue date
Mar 7, 2006
Intel Corporation
Valery M. Dubin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple exposure technique to pattern tight contact geometries
Patent number
6,968,532
Issue date
Nov 22, 2005
Intel Corporation
Swaminathan (Sam) Sivakumar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Interconnect structures containing conductive electrolessly deposit...
Patent number
6,958,547
Issue date
Oct 25, 2005
Intel Corporation
Valery M. Dubin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of via patterning utilizing hard mask and stripping patterni...
Patent number
6,472,315
Issue date
Oct 29, 2002
Intel Corporation
Phi L. Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Highly selective etch process for submicron contacts
Patent number
6,001,699
Issue date
Dec 14, 1999
Intel Corporation
Phi L. Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of controlling etch bias with a fixed lithography pattern fo...
Patent number
5,933,759
Issue date
Aug 3, 1999
Intel Corporation
Phi L. Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch process to produce rounded top corners for sub-micron silicon...
Patent number
5,843,846
Issue date
Dec 1, 1998
Intel Corporation
Phi L. Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Multiple exposure technique to pattern tight contact geometries
Publication number
20050081178
Publication date
Apr 14, 2005
Swaminathan (Sam) Sivakumar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Use of conductive electrolessly deposited etch stop layers, liner l...
Publication number
20030207560
Publication date
Nov 6, 2003
Valery M. Dubin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Interconnect structures containing conductive electrolessly deposit...
Publication number
20030207561
Publication date
Nov 6, 2003
Valery M. Dubin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Unique via patterning scheme which utilizes hard mask cap for low d...
Publication number
20010016405
Publication date
Aug 23, 2001
Phi L. Nguyen
H01 - BASIC ELECTRIC ELEMENTS