Philip A. Grunow

Follow

Person

San Leandro, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for the protection of extreme ultraviolet lithography optics
- Patent number 7,740,916
- Issue date Jun 22, 2010
- EUV LLC
- Philip A. Grunow
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method for in-situ cleaning of carbon contaminated surfaces
- Patent number 7,147,722
- Issue date Dec 12, 2006
- EUV LLC
- Leonard E. Klebanoff
- B08 - CLEANING
Information Patent Grant
Apparatus for in situ cleaning of carbon contaminated surfaces
- Patent number 6,772,776
- Issue date Aug 10, 2004
- EUV LLC
- Leonard E. Klebanoff
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR THE PROTECTION OF EXTREME ULTRAVIOLET LITHOGRAPHY OPTICS
- Publication number 20100124723
- Publication date May 20, 2010
- Philip A. Grunow
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus for in-situ cleaning of carbon contaminated surfaces
- Publication number 20040211448
- Publication date Oct 28, 2004
- EUV LLC
- Leonard E. Klebanoff
- B08 - CLEANING
Information Patent Application
Apparatus for in situ cleaning of carbon contaminated surfaces
- Publication number 20030051739
- Publication date Mar 20, 2003
- Leonard E. Klebanoff
- H01 - BASIC ELECTRIC ELEMENTS