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High conductance water pump
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Patent number 5,483,803
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Issue date Jan 16, 1996
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Helix Technology Corporation
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Stephen R. Matte
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Vacuum system with molecular flow line
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Patent number 4,860,546
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Issue date Aug 29, 1989
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Helix Technology Corporation
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John T. Harvell
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Cryopump with quicker adsorption
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Patent number 4,718,241
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Issue date Jan 12, 1988
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Helix Technology Corporation
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Philip A. Lessard
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Temperature control of cryogenic systems
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Patent number 4,679,401
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Issue date Jul 14, 1987
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Helix Technology Corporation
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Philip A. Lessard
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Cryopump with improved adsorption capacity
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Patent number 4,494,381
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Issue date Jan 22, 1985
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Helix Technology Corporation
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Philip A. Lessard
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Fluid actuator for cryogenic valve
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Patent number 4,466,251
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Issue date Aug 21, 1984
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Helix Technology Corporation
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Fred F. Chellis
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F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
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Means for periodic desorption of a cryopump
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Patent number 4,438,632
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Issue date Mar 27, 1984
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Helix Technology Corporation
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Philip A. Lessard
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...