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Philip D. Flanner III
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Union City, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Calculated electrical performance metrics for process monitoring an...
Patent number
10,079,183
Issue date
Sep 18, 2018
KLA-Tenor Corporation
Xiang Gao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Techniques for optimized scatterometry
Patent number
9,127,927
Issue date
Sep 8, 2015
KLA-Tencor Corporation
Jonathan Iloreta
G01 - MEASURING TESTING
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Patent Grant
High throughput thin film characterization and defect detection
Patent number
8,711,349
Issue date
Apr 29, 2014
KLA-Tencor Corporation
Xiang Gao
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for calibrating an ellipsometer
Patent number
5,581,350
Issue date
Dec 3, 1996
Tencor Instruments
Xing Chen
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Calculated Electrical Performance Metrics For Process Monitoring An...
Publication number
20150006097
Publication date
Jan 1, 2015
KLA-Tencor Corporation
Xiang Gao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TECHNIQUES FOR OPTIMIZED SCATTEROMETRY
Publication number
20130158948
Publication date
Jun 20, 2013
Jonathan Iloreta
G01 - MEASURING TESTING
Information
Patent Application
High Throughput Thin Film Characterization And Defect Detection
Publication number
20130083320
Publication date
Apr 4, 2013
KLA-Tencor Corporation
Xiang Gao
G01 - MEASURING TESTING