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Philip Douglas Rossbrook
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Clevedon, GB
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last 30 patents
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Patent Grant
Method for generating and using a plasma processing control program
Patent number
7,822,494
Issue date
Oct 26, 2010
Oxford Instruments Plasma Technology Limited
Andrew Leonard Goodyear
G05 - CONTROLLING REGULATING
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last 30 patents
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Patent Application
Method for generating and using a plasma processing control program
Publication number
20090216342
Publication date
Aug 27, 2009
Andrew Leonard Goodyear
G05 - CONTROLLING REGULATING