Philipp Bosselmann

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Frankfurt, DE

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Patents Grantslast 30 patents

Information Patent Grant
EUV illumination system with a system for measuring fluctuations of...
- Patent number 8,513,628
- Issue date Aug 20, 2013
- Carl Zeiss SMT GmbH
- Axel Scholz
- B82 - NANO-TECHNOLOGY
Information Patent Grant
EUV illumination system with a system for measuring fluctuations of...
- Patent number 7,875,865
- Issue date Jan 25, 2011
- Carl Zeiss SMT AG
- Axel Scholz
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Illumination system for a wavelength of ≦ 193 nm, with sensors for...
- Patent number 7,473,907
- Issue date Jan 6, 2009
- Carl Zeiss SMT AG
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EUV ILLUMINATION SYSTEM WITH A SYSTEM FOR MEASURING FLUCTUATIONS OF...
- Publication number 20110079737
- Publication date Apr 7, 2011
- Carl Zeiss SMT AG
- Axel Scholz
- G01 - MEASURING TESTING
Information Patent Application
EUV ILLUMINATION SYSTEM WITH A SYSTEM FOR MEASURING FLUCTUATIONS OF...
- Publication number 20080258070
- Publication date Oct 23, 2008
- Carl Zeiss SMT AG
- Axel Scholz
- G01 - MEASURING TESTING
Information Patent Application
Illumination system for a wavelength of less than or equal to 193 n...
- Publication number 20050274897
- Publication date Dec 15, 2005
- Carl Zeiss SMT AG and ASML Netherlands
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY