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Philipp Huethwohl
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Ulm, DE
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Patents Grants
last 30 patents
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Patent Grant
Method of recording an image using a particle microscope
Patent number
11,728,130
Issue date
Aug 15, 2023
Carl Zeiss SMT GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Multi-scanning electron microscopy for wafer alignment
Patent number
10,901,391
Issue date
Jan 26, 2021
Carl Zeiss SMT GmbH
Jagdish Chandra Saraswatula
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...
Publication number
20240281952
Publication date
Aug 22, 2024
Carl Zeiss SMT GMBH
Thomas Korb
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DEFECT DETECTION FOR SEMICONDUCTOR STRUCTURES ON A WAFER
Publication number
20230260105
Publication date
Aug 17, 2023
Carl Zeiss SMT GMBH
Thomas Korb
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INTERACTIVE AND ITERATIVE TRAINING OF A CLASSIFICATION ALGORITHM FO...
Publication number
20220044949
Publication date
Feb 10, 2022
Carl Zeiss SMT GMBH
Thomas Korb
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD OF RECORDING AN IMAGE USING A PARTICLE MICROSCOPE
Publication number
20210296089
Publication date
Sep 23, 2021
Carl Zeiss SMT GMBH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER INSPECTION METHODS AND SYSTEMS
Publication number
20210073976
Publication date
Mar 11, 2021
Carl Zeiss SMT GMBH
Jagdish Chandra Saraswatula
G06 - COMPUTING CALCULATING COUNTING