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Philippe GAUBERT
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Nirasaki-shi, Yamanashi, JP
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last 30 patents
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Patent Grant
Method of manufacturing semiconductor device
Patent number
11,869,927
Issue date
Jan 9, 2024
Tokyo Electron Limited
Yumiko Kawano
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240304439
Publication date
Sep 12, 2024
TOKYO ELECTRON LIMITED
Koji AKIYAMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
Publication number
20230326977
Publication date
Oct 12, 2023
TOKYO ELECTRON LIMITED
Koji AKIYAMA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20210399085
Publication date
Dec 23, 2021
Tokyo Electron Limited
Yumiko KAWANO
H01 - BASIC ELECTRIC ELEMENTS