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Philippe Helin
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Wezembeek-Oppem, BE
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Patents Grants
last 30 patents
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Patent Grant
MEMS element and electrical device using the same
Patent number
8,610,224
Issue date
Dec 17, 2013
Panasonic Corporation
Yasuyuki Naito
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
MEMS ELEMENT AND ELECTRICAL DEVICE USING THE SAME
Publication number
20130214366
Publication date
Aug 22, 2013
Yasuyuki NAITO
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
Method for Sealing a Micro-Cavity
Publication number
20120256308
Publication date
Oct 11, 2012
IMEC
Philippe Helin
B81 - MICRO-STRUCTURAL TECHNOLOGY